Using Genetic Algorithms with Local Search for Thin Film Metrology

نویسندگان

  • Mark Land
  • John J. SIDorowich
  • Richard K. Belew
چکیده

Metrology Mark Land Cognitive Computer Science Research Group Computer Science Department University of California at San Diego La Jolla, CA 92093-0114 John J. SIDorowich 7150 Aptos View Road Aptos, CA 95003 Richard K. Belew Cognitive Computer Science Research Group Computer Science Department University of California at San Diego La Jolla, CA 92093-0114 Abstract Nondestructively determining the essential parameters that describe the structure of a semiconductor wafer is a challenging inverse problem. We describe use of an optical inspection technology and show that it can be used e ectively in conjunction with genetic algorithms (GAs) and local optimization methods. We also use this concrete application to investigate GA/local search hybrids, compare them to simulated annealing, and investigate the value of the recombination operator relative to the \random crossover" variant suggested by T. Jones.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

A Hybrid Algorithm using Firefly, Genetic, and Local Search Algorithms

In this paper, a hybrid multi-objective algorithm consisting of features of genetic and firefly algorithms is presented. The algorithm starts with a set of fireflies (particles) that are randomly distributed in the solution space; these particles converge to the optimal solution of the problem during the evolutionary stages. Then, a local search plan is presented and implemented for searching s...

متن کامل

GENETIC AND TABU SEARCH ALGORITHMS FOR THE SINGLE MACHINE SCHEDULING PROBLEM WITH SEQUENCE-DEPENDENT SET-UP TIMES AND DETERIORATING JOBS

 This paper introduces the effects of job deterioration and sequence dependent set- up time in a single machine scheduling problem. The considered optimization criterion is the minimization of the makespan (Cmax). For this purpose, after formulating the mathematical model, genetic and tabu search algorithms were developed for the problem. Since population diversity is a very important issue in ...

متن کامل

Solving the Ride-Sharing Problem with Non-Homogeneous Vehicles by Using an Improved Genetic Algorithm with Innovative Mutation Operators and Local Search Methods

An increase in the number of vehicles in cities leads to several problems, including air pollution, noise pollution, and congestion. To overcome these problems, we need to use new urban management methods, such as using intelligent transportation systems like ride-sharing systems. The purpose of this study is to create and implement an improved genetic algorithms model for ride-sharing with non...

متن کامل

Winner Determination in Combinatorial Auctions using Hybrid Ant Colony Optimization and Multi-Neighborhood Local Search

A combinatorial auction is an auction where the bidders have the choice to bid on bundles of items. The WDP in combinatorial auctions is the problem of finding winning bids that maximize the auctioneer’s revenue under the constraint that each item can be allocated to at most one bidder. The WDP is known as an NP-hard problem with practical applications like electronic commerce, production manag...

متن کامل

Mathematical Programming Models for Solving Unequal-Sized Facilities Layout Problems - a Generic Search Method

 This paper present unequal-sized facilities layout solutions generated by a genetic search program named LADEGA (Layout Design using a Genetic Algorithm). The generalized quadratic assignment problem requiring pre-determined distance and material flow matrices as the input data and the continuous plane model employing a dynamic distance measure and a material flow matrix are discussed. Computa...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 1997